Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Reducing intrinsic loss in superconducting resonators by surface
  treatment and deep etching of silicon substrates   We present microwave-frequency NbTiN resonators on silicon, systematically
achieving internal quality factors above 1 M in the quantum regime. We use two
techniques to reduce losses associated with two-level systems: an additional
substrate surface treatment prior to NbTiN deposition to optimize the
metal-substrate interface, and deep reactive-ion etching of the substrate to
displace the substrate-vacuum interfaces away from high electric fields. The
temperature and power dependence of resonator behavior indicate that two-level
systems still contribute significantly to energy dissipation, suggesting that
more interface optimization could further improve performance.

17
The categories of this paper are: q-fin
10
The categories of this paper are: q-bio
36
The categories of this paper are: cmp-lg
28
The categories of this paper are: alg-geom
20
The categories of this paper are: acc-phys
6
The categories of this paper are: astro-ph
31
The categories of this paper are: ao-sci
16
The categories of this paper are: stat
33
The categories of this paper are: plasm-ph
12
The categories of this paper are: nucl-th
29
The categories of this paper are: funct-an
18
The categories of this paper are: econ
30
The categories of this paper are: q-alg
1
The categories of this paper are: cs
23
The categories of this paper are: solv-int
11
The categories of this paper are: hep-lat