Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon   The evolution is presented of infrared transmission spectra of hydrogenated
and chlorinated amorphous silicon films versus the chlorine concentration and
the annealing temperature. As the chlorine content increases, an increase of
the 2100 cm-1 band intensity is observed. We associate this effect with the
existence of SiH2CI2, mixed configurations. The Sic1 stretching band, located
at 545 cm-1 in unannealed samples, shifts continuously up to 590 cm-1 as the
annealing temperature increases. This displacement is attributed to a
predominance of SiCI2, species around 500{\deg}C and their transformation to
SiCl, species and SiCl, molecules above 700{\deg}C.

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The categories of this paper are: astro-ph
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The categories of this paper are: dg-ga
27
The categories of this paper are: comp-gas
37
The categories of this paper are: supr-con
13
The categories of this paper are: quant-ph
17
The categories of this paper are: q-fin
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The categories of this paper are: patt-sol
0
The categories of this paper are: hep-ph
21
The categories of this paper are: adap-org
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The categories of this paper are: hep-ex
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The categories of this paper are: q-bio
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The categories of this paper are: hep-th
22
The categories of this paper are: chao-dyn
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The categories of this paper are: econ
36
The categories of this paper are: cmp-lg
20
The categories of this paper are: acc-phys