Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Solid Phase Recrystallization and Dopant Activation in Arsenic
  Ion-Implanted Silicon-On-Insulator by UV Laser Annealing   UV laser annealing (UV-LA) enables surface-localized high-temperature thermal
processing to form abrupt junctions in emerging monolithically stacked devices,
where applicable thermal budget is restricted. In this work, UV-LA is performed
to regrow a SOI layer partially amorphized by arsenic ion implantation and to
activate the dopants. In a microsecond scale (~10^-6 s to ~10^-5 s) UV-LA
process, monocrystalline solid phase recrystallization and dopant activation
without junction deepening is evidenced, thus opening various applications in
low thermal budget integration flows.

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The categories of this paper are: hep-lat
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The categories of this paper are: supr-con
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The categories of this paper are: nucl-ex
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The categories of this paper are: comp-gas
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The categories of this paper are: nlin
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The categories of this paper are: chem-ph
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The categories of this paper are: dg-ga
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The categories of this paper are: adap-org
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The categories of this paper are: q-fin
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The categories of this paper are: bayes-an
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The categories of this paper are: q-alg
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The categories of this paper are: cond-mat
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The categories of this paper are: astro-ph
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The categories of this paper are: solv-int
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The categories of this paper are: chao-dyn
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The categories of this paper are: mtrl-th