Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Boron and Barium Incorporation at the 4H-SiC/SiO2 Interface using a
  Laser Multi-Charged Ion Source   A laser multicharged ion source was used to perform interfacial treatment of
the 4H-SiC/ SiO2 interface using B and Ba ions. A Q-switched Nd:YAG laser
(wavelength {\lambda} = 1064 nm, pulse width {\tau} = 7 ns, and fluence F = 135
J/cm2) was used to ablate B and Ba targets to generate multicharged ions. The
ions were deflected by an electrostatic field to separate them from the
neutrals. The multicharged ions were used for nanometer layer growth and
shallow ion implantation in 4H-SiC. Several metal-oxide-semiconductor
capacitors (MOSCAP) were fabricated with a combination of B and Ba at the
SiC/SiO2 interface. High-low C-V measurements were used to characterize the
MOSCAPs. The B interfacial layer reduced the MOSCAP flatband voltage from 4.5
to 0.04 V, while the Ba layer had a negligible effect.

26
The categories of this paper are: bayes-an
36
The categories of this paper are: cmp-lg
6
The categories of this paper are: astro-ph
7
The categories of this paper are: hep-th
28
The categories of this paper are: alg-geom
23
The categories of this paper are: solv-int
24
The categories of this paper are: dg-ga
11
The categories of this paper are: hep-lat
5
The categories of this paper are: gr-qc
14
The categories of this paper are: math-ph
18
The categories of this paper are: econ
15
The categories of this paper are: nucl-ex
0
The categories of this paper are: hep-ph
33
The categories of this paper are: plasm-ph
37
The categories of this paper are: supr-con
12
The categories of this paper are: nucl-th