Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Numerical and experimental studies of the carbon etching in EUV-induced
  plasma   We have used a combination of numerical modeling and experiments to study
carbon etching in the presence of a hydrogen plasma. We model the evolution of
a low density EUV-induced plasma during and after the EUV pulse to obtain the
energy resolved ion fluxes from the plasma to the surface. By relating the
computed ion fluxes to the experimentally observed etching rate at various
pressures and ion energies, we show that at low pressure and energy, carbon
etching is due to chemical sputtering, while at high pressure and energy a
reactive ion etching process is likely to dominate.

19
The categories of this paper are: eess
20
The categories of this paper are: acc-phys
29
The categories of this paper are: funct-an
32
The categories of this paper are: atom-ph
7
The categories of this paper are: hep-th
0
The categories of this paper are: hep-ph
28
The categories of this paper are: alg-geom
6
The categories of this paper are: astro-ph
13
The categories of this paper are: quant-ph
5
The categories of this paper are: gr-qc
14
The categories of this paper are: math-ph
25
The categories of this paper are: patt-sol
33
The categories of this paper are: plasm-ph
8
The categories of this paper are: hep-ex
17
The categories of this paper are: q-fin
2
The categories of this paper are: math