Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Ion Beam Synthesis of embedded SiC   The synthesis of embedded silicon carbide was carried out in N type silicon
samples having (100) and (111) orientations using high dose implantation of
carbon ions at room temperature. The variation of dose was employed to get dose
dependence of silicon carbide formation. Postimplant annealing at 1000 C in
order to anneal out the implantion induced defects and to get silicon carbide
precipitates in silicon matrix. Detailed Fourier tarnsform infrared
spectroscopy analysis and x-ray diffraction studies confirms the formation of
cubic phase of silicon carbide. The grain size of the silicon carbide
precipitates is estimated to a few nano meters. The silicon carbide
precipitates have been found to exhibit a better crystalline order in silicon
(100) samples than in silicon (111) samples.The x-ray diffraction results also
indicate the amorphization of bombarded region of the silicon samples. After
annealing the amorphized region got recrystalized into a polycrystalline phase
of silicon.

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The categories of this paper are: supr-con
34
The categories of this paper are: chem-ph
15
The categories of this paper are: nucl-ex
10
The categories of this paper are: q-bio
23
The categories of this paper are: solv-int
27
The categories of this paper are: comp-gas
22
The categories of this paper are: chao-dyn
5
The categories of this paper are: gr-qc
11
The categories of this paper are: hep-lat
12
The categories of this paper are: nucl-th
1
The categories of this paper are: cs
29
The categories of this paper are: funct-an
36
The categories of this paper are: cmp-lg
20
The categories of this paper are: acc-phys
30
The categories of this paper are: q-alg
24
The categories of this paper are: dg-ga