Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Quantitative depth profiling of Si1-xGex structures by time-of-flight
  secondary ion mass spectrometry and secondary neutral mass spectrometry   Quantification of Ge in Si1-xGex structures (0.092<x<0.78) was carried by
time-of-flight secondary ion mass spectrometry (TOF-SIMS) and electron-gas
secondary neutral mass spectrometry (SNMS). A good linear correlation
(R2>0.9997) of intensity ratios of GeCs2+/SiCs2+ and 74Ge-/30Si- secondary ions
and post-ionized 70Ge+/28Si+ sputtered neutrals with Ge concentration was
obtained. The calibration data were used for quantitative depth profiling of
[10x(12.3 nm Si0.63Ge0.37/34 nm Si)] structures on Si. Satisfactory compliance
of the quantified Ge concentration in SiGe layers with the data measured by
high-resolution X-ray diffraction was obtained for both techniques. Both SIMS
and SNMS experimental profiles were fitted using the Hofmann
mixing-roughness-information depth (MRI) model. In case of TOF-SIMS the quality
of the reconstruction was higher than for SNMS since not only the progressing
roughening, but also crater effect and other processes unaccounted in the MRI
simulation could have significant impact on plasma sputter depth profiling.

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The categories of this paper are: nlin
27
The categories of this paper are: comp-gas
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The categories of this paper are: bayes-an
29
The categories of this paper are: funct-an
33
The categories of this paper are: plasm-ph
30
The categories of this paper are: q-alg
8
The categories of this paper are: hep-ex
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The categories of this paper are: hep-lat
36
The categories of this paper are: cmp-lg
7
The categories of this paper are: hep-th
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The categories of this paper are: stat
35
The categories of this paper are: mtrl-th
32
The categories of this paper are: atom-ph
12
The categories of this paper are: nucl-th
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The categories of this paper are: math-ph
2
The categories of this paper are: math