Instruct: Identify the main and secondary category of Arxiv papers based on the titles
Query: Silicon on Nothing Mems Electromechanical Resonator
30
The categories of this paper are: q-alg
19
The categories of this paper are: eess
4
The categories of this paper are: cond-mat
16
The categories of this paper are: stat
27
The categories of this paper are: comp-gas
25
The categories of this paper are: patt-sol
34
The categories of this paper are: chem-ph
6
The categories of this paper are: astro-ph
36
The categories of this paper are: cmp-lg
0
The categories of this paper are: hep-ph
18
The categories of this paper are: econ
9
The categories of this paper are: nlin
29
The categories of this paper are: funct-an
20
The categories of this paper are: acc-phys
24
The categories of this paper are: dg-ga
35
The categories of this paper are: mtrl-th