Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Determination of fracture toughness of thin-film amorphous silicon using
  spiral crack structures   We prepared thin layers of amorphous silicon by deposition of a liquid-phase
polysilane precurser on glass substrate. Raman scattering provides evidence for
residual tensile stress in the silicon, which is evaluated quantitatively.
Under treatment with hydrofluoric acid, this stress leads to spiral cracks in
the silicon. We explain the process of crack formation and examine this
phenomenon both analytically and numerically, the latter with the finite
element method (FEM). The FEM yields the geometry correction factor for such
spiral cracks in terms of the Griffith criterion. This allows for the first
time the determination of fracture toughness of amorphous silicon, which is
greatly enhanced in comparison with crystalline silicon.

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The categories of this paper are: hep-ph
20
The categories of this paper are: acc-phys
16
The categories of this paper are: stat
12
The categories of this paper are: nucl-th
35
The categories of this paper are: mtrl-th
22
The categories of this paper are: chao-dyn
7
The categories of this paper are: hep-th
30
The categories of this paper are: q-alg
15
The categories of this paper are: nucl-ex
17
The categories of this paper are: q-fin
9
The categories of this paper are: nlin
13
The categories of this paper are: quant-ph
19
The categories of this paper are: eess
26
The categories of this paper are: bayes-an
34
The categories of this paper are: chem-ph
36
The categories of this paper are: cmp-lg