Instruct: Identify the main and secondary category of Arxiv papers based on the titles
Query: Extreme Ultraviolet (EUV) Sources for Lithography based on Synchrotron
  Radiation
29
The categories of this paper are: funct-an
8
The categories of this paper are: hep-ex
28
The categories of this paper are: alg-geom
1
The categories of this paper are: cs
10
The categories of this paper are: q-bio
11
The categories of this paper are: hep-lat
18
The categories of this paper are: econ
7
The categories of this paper are: hep-th
13
The categories of this paper are: quant-ph
0
The categories of this paper are: hep-ph
33
The categories of this paper are: plasm-ph
25
The categories of this paper are: patt-sol
35
The categories of this paper are: mtrl-th
19
The categories of this paper are: eess
21
The categories of this paper are: adap-org
12
The categories of this paper are: nucl-th