Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Optical Activity at 1.55 micron in Si:Er:O Deposited Films   Silicon films doped with Er and O were prepared by techniques of physical
vapor deposition on crystalline silicon, ion beam mixing and oxygen
incorporation through Ar+ and O2+ implantation, and thermal annealing.
Processing steps were tailored to be compatible with standard CMOS and to be of
notably low cost to fabricate optically active media for silicon-based infrared
emitters. The Si:Er:O films exhibit strong photoluminescence at room
temperature that is analogous to Stark-split Er+3 ion 1.55-micron bands in
fiber-optic materials. Concentration distributions were determined by
Rutherford backscattering spectrometry. It is found that photoluminescence
signals increase with the O to Er ratio. Ion implantation effectively enhances
the thermal diffusion of Er and improves its optical activation.

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The categories of this paper are: nucl-ex
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The categories of this paper are: stat
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The categories of this paper are: solv-int
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The categories of this paper are: math
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The categories of this paper are: bayes-an
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The categories of this paper are: patt-sol
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The categories of this paper are: hep-ex
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The categories of this paper are: q-alg
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The categories of this paper are: dg-ga
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The categories of this paper are: chao-dyn
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The categories of this paper are: math-ph
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The categories of this paper are: nucl-th
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The categories of this paper are: q-fin
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The categories of this paper are: cmp-lg
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The categories of this paper are: econ
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The categories of this paper are: atom-ph