Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Detection of low energy single ion impacts in micron scale transistors
  at room temperature   We report the detection of single ion impacts through monitoring of changes
in the source-drain currents of field effect transistors (FET) at room
temperature. Implant apertures are formed in the interlayer dielectrics and
gate electrodes of planar, micro-scale FETs by electron beam assisted etching.
FET currents increase due to the generation of positively charged defects in
gate oxides when ions (121Sb12+, 14+, Xe6+; 50 to 70 keV) impinge into channel
regions. Implant damage is repaired by rapid thermal annealing, enabling
iterative cycles of device doping and electrical characterization for
development of single atom devices and studies of dopant fluctuation effects.

2
The categories of this paper are: math
31
The categories of this paper are: ao-sci
12
The categories of this paper are: nucl-th
3
The categories of this paper are: physics
17
The categories of this paper are: q-fin
32
The categories of this paper are: atom-ph
13
The categories of this paper are: quant-ph
11
The categories of this paper are: hep-lat
22
The categories of this paper are: chao-dyn
9
The categories of this paper are: nlin
8
The categories of this paper are: hep-ex
10
The categories of this paper are: q-bio
28
The categories of this paper are: alg-geom
16
The categories of this paper are: stat
21
The categories of this paper are: adap-org
7
The categories of this paper are: hep-th