Scanning probe microscopy
What person invented the atomic force microscope?
Microscope
The 1980s saw the development of the first scanning probe microscopes. The first was the scanning tunneling microscope in 1981, developed by Gerd Binnig and Heinrich Rohrer. This was closely followed in 1986 with Gerd Binnig, Quate, and Gerber's invention of the atomic force microscope.