Self-aligned fabrication process for silicon quantum computer devices
  We describe a fabrication process for devices with few quantum bits (qubits), which are suitable for proof-of-principle demonstrations of silicon-based quantum computation. The devices follow the Kane proposal to use the nuclear spins of 31P donors in 28Si as qubits, controlled by metal surface gates and measured using single electron transistors (SETs). The accurate registration of 31P donors to control gates and read-out SETs is achieved through the use of a self-aligned process which incorporates electron beam patterning, ion implantation and triple-angle shadow-mask metal evaporation. 
T.M. Buehler, R.P. McKinnon, N.E. Lumpkin, R. Brenner, D.J. Reilly,   L.D. Macks, A.R. Hamilton, A.S. Dzurak and R.G. Clark