Makefile: Recreate benchmark_out/ in bench task, since clean deletes it.
Makefile: Recreate benchmark_out/ in bench task, since clean deletes it.

atomicobject/heatshrink,silentbicycle/heatshrink,senyor/heatshrink,silentbicycle/heatshrink,senyor/heatshrink,jordandcarter/heatshrink,atomicobject/heatshrink,jordandcarter/heatshrink